Handbook of Semiconductor Manufacturing Technology
اسم المؤلف
Robert Doering, Yoshio Nishi
التاريخ
المشاهدات
440
التقييم
(لا توجد تقييمات)
Loading...
التحميل

Handbook of Semiconductor Manufacturing Technology
Second Edition
Edited by
Robert Doering, Yoshio Nishi
Contents
1 Introduction to Semiconductor Devices John R. Hauser . 1-1
2 Overview of Interconnect—Copper and Low-K Integration Girish A. Dixit and
Robert H. Havemann 2-1
3 Silicon Materials Wen Lin and Howard Huff . 3-1
4 SOI Materials and Devices Sorin Cristoloveanu and George K. Celler . 4-1
5 Surface Preparation Glenn W. Gale, Brian K. Kirkpatrick, and Frederick W. Kern, Jr . 5-1
6 Supercritical Carbon Dioxide in Semiconductor Cleaning Mohammed J. Meziani,
Pankaj Pathak, and Ya-Ping Sun . 6-1
7 Ion Implantation Michael Ameen, Ivan Berry, Walter Class, Hans-Joachim Gossmann,
and Leonard Rubin 7-1
8 Dopant Diffusion Sanjay Banerjee . 8-1
9 Oxidation and Gate Dielectrics C. Rinn Cleavelin, Luigi Colombo,
Hiro Niimi, Sylvia Pas, and Eric M. Vogel 9-1
10 Silicides Christian Lavoie, Francois M. d’Heurle and Shi-Li Zhang . 10-1
11 Rapid Thermal Processing P.J. Timans . 11-1
12 Low-K Dielectrics Ting Y. Tsui and Andrew J. McKerrow . 12-1
13 Chemical Vapor Deposition Li-Qun Xia and Mei Chang . 13-1
14 Atomic Layer Deposition Thomas E. Seidel . 14-1
15 Physical Vapor Deposition Stephen M. Rossnagel . 15-1
16 Damascene Copper Electroplating Jonathan Reid 16-117 Chemical–Mechanical Polishing Gregory B. Shinn, Vincent Korthuis,
Gautum Grover, Simon Fang, and Duane S. Boning 17-1
18 Optical Lithography Gene E. Fuller . 18-1
19 Photoresist Materials and Processing Ce´sar M. Garza, Will Conley, and Jeff Byers 19-1
20 Photomask Fabrication Syed A. Rizvi and Sylvia Pas 20-1
21 Plasma Etch Peter L.G. Ventzek, Shahid Rauf, and Terry Sparks . 21-1
22 Equipment Reliability Vallabh H. Dhudshia . 22-1
23 Overview of Process Control Stephanie Watts Butler 23-1
24 In-Line Metrology Alain C. Diebold . 24-1
25 In-Situ Metrology Gabriel G. Barna and Brad VanEck . 25-1
26 Yield Modeling Ron Ross and Nick Atchison . 26-1
27 Yield Management Louis Breaux and Sean Collins . 27-1
28 Electrical, Physical, and Chemical Characterization Dieter K. Schroder,
Bruno W. Schueler, Thomas Shaffner, and Greg S. Strossman 28-1
29 Failure Analysis Lawrence C. Wagner 29-1
30 Reliability Physics and Engineering J.W. McPherson and E.T. Ogawa . 30-1
31 Effects of Terrestrial Radiation on Integrated Circuits Robert Baumann 31-1
32 Integrated-Circuit Packaging Michael Lamson, Andreas Cangellaris,
and Erdogan Madenci . 32-1
33 300 mm Wafer Fab Logistics and Automated Material
Handling Systems Leonard Foster and Devadas Pillai 33-1
34 Factory Modeling Samuel C. Wood 34-1
35 Economics of Semiconductor Manufacturing G. Dan Hutcheson . 35-1Appendix A: Physical Constants A-1
Appendix B: Units Conversion B-1
Appendix C: Standards Commonly Used in Semiconductor Manufacturing . C-1
Appendix D: Acronyms D-1
Index .
كلمة سر فك الضغط : books-world.net

The Unzip Password : books-world.net

تحميل

يجب عليك التسجيل في الموقع لكي تتمكن من التحميل

تسجيل | تسجيل الدخول